Fabrication and characterization of silicon woodpile photonic crystals with a complete bandgap at telecom wavelengths

  • Autor:

    I. Staude, M. Thiel, S. Essig, C. Wolff, K. Busch, G. von Freymann, and M. Wegener

  • Quelle: Opt. Lett. 35, 1094 (2010)
  • Datum: 31.3.2010
  • Abstract:

    By using direct laser writing into a novel commercially available photoresist and a silicon-double-inversion procedure followed by tempering of the silicon structures, we realize high-quality centered-tetragonal woodpile photonic crystals with complete photonic bandgaps near 1.55 μm wavelength. The 6.9% gap-to-midgap ratio bandgap is evidenced by the comparison of measured transmittance and reflectance spectra with band-structure and scattering-matrix calc