Fabrication of Silicon Inverse Woodpile Photonic Crystals
- Author: M. Hermatschweiler, A. Ledermann, G. A. Ozin, M. Wegener, G. von Freymann
Adv. Funct. Mater. 17, 2273 (2007)
- Date: 17.8.2007
Abstract:Silicon inverse woodpile photonic crystals are fabricated for the first time. Our approach, which is based on direct laser writing of polymeric templates and a novel silicon single-inversion procedure, leads to high-quality structures with gap/midgap ratios of 14.2 %, centered at a wavelength of 2.5 μm. It is shown that gap/midgap ratios as large as 20.5 %, centered at 1.55 μm, may become possible in the future.