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Pump–probe spectroscopy on photoinitiators for stimulated-emission-depletion optical lithography

Pump–probe spectroscopy on photoinitiators for stimulated-emission-depletion optical lithography
Author: T.J.A. Wolf, J. Fischer, M. Wegener, and A. Unterreiner links:
Source: Opt. Lett. 36, 3188 (2011)
Date: 11.8.2011

Abstract:

We report on femtosecond pump–probe experiments on two different photoinitiators in solution. These two molecules have recently appeared as attractive candidates for far-field optical lithography based on stimulated-emission-depletion (STED) inspired approaches aiming at beating Abbe’s diffraction limit. For the case of 7-diethylamino-3-thenoylcoumarin (DETC), we find that stimulated emission clearly dominates over excited-state absorption, whereas the opposite holds true for the case of isopropylthioxanthone. We argue that it is desirable that stimulated emission dominates over excited-state absorption as depletion mechanism in STED photoresists. Thus, DETC is an attractive corresponding photoinitiator.